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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/9874

Title: Nanocrystalline diamond piezoresistive sensor
Authors: Kulha, P.
Kromka, A.
Babchenko, Oleg
Vanecek, M.
Husak, M.
Williams, Oliver
Haenen, Ken
Issue Date: 2009
Publisher: PERGAMON-ELSEVIER SCIENCE LTD, THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, ENGLAND
Citation: VACUUM, 84(1). p. 53-56
Abstract: The design, fabrication and test of piezoresistive sensors based on nanocrystalline diamond (NCD) films are reported. The CoventorWare FEM calculations of the mechanical stress and geometrical deformations of a 3-D structure are used for a proper localization of the piezoresistor on the carrying substrate. The boron-doped piezoresistive sensing element was realized using a directed patterned growth of NCD film on SiO2/Si by microwave plasma-enhanced chemical vapour deposition (CVD). The gauge factor of borondoped NCD films was investigated in the range from room temperature up to 200 C and from 0 to 5 N of the applied force. These NCD piezoresistive sensor elements are compared with a Silicon-on-Insulator (SOI) based piezoresistive sensor and their high-temperature applications are discussed.
Notes: Addresses: 1. Czech Tech Univ, Prague 16627, Czech Republic 2. ASCR, Inst Phys, Prague 16200, Czech Republic 3. Hasselt Univ, Inst Mat Res, IMO, B-3590 Diepenbeek, Belgium 4. IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium E-mail Addresses: kulhap@fel.cvut.cz
URI: http://hdl.handle.net/1942/9874
DOI: 10.1016/j.vacuum.2009.04.023
ISI #: 000270625900012
ISSN: 0042-207X
Category: A1
Type: Journal Contribution
Validation: ecoom, 2010
Appears in Collections: Research publications

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