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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/9286

Title: Crystallization resistance of barium titanate zirconate ultrathin films from aqueous CSD: a study of cause and effect
Authors: HARDY, An
Van Elshocht, Sven
Knaepen, Werner
Conard, Thierry
Brijs, Bert
Vandervorst, Wilfred
Pourtois, Geoffrey
Kittl, Jorge
Detavernier, Christophe
Heyns, Marc
VAN BAEL, Marlies
Issue Date: 2009
Citation: JOURNAL OF MATERIALS CHEMISTRY, 19(8). p. 1115-1122
Abstract: Ultrathin BaZr0.8Ti0.2O3 films (t < 30 nm) on SiOx/Si substrates were obtained by means of aqueous chemical solution deposition (CSD). Though the precursor crystallized into cubic perovskite powder at 600 degrees C, ultrathin films only crystallized at 950 to 1000 degrees C, even after addition of excess Ba to compensate for loss of Ba. Films with thickness above 100 nm, on the other hand, crystallized readily around 650 degrees C. The crystallization is related to film thickness, affecting the crystallization activation energy, and to silicate formation by reaction with the substrate, exerting its largest influence in ultrathin films. Barium deficiency, silicate formation, carbonate secondary phase and the high activation energy for crystallization resulted in the amorphous nature of the ultrathin films, which strongly affects the observed k value (similar to 15). The paper contributes insights with implications for the application of BaZr0.8Ti0.2O3 as an alternative high-k gate dielectric.
Notes: [Hardy, An; D'Haen, Jan; Van Bael, Marlies K.; Van den Rul, Heidi; Mullens, Jules] Hasselt Univ, Inst Mat Res, Lab Inorgan & Phys Chem, Diepenbeek, Belgium. [Hardy, An; D'Haen, Jan; Van Bael, Marlies K.; Van den Rul, Heidi] IMEC VZW, Div IMOMEC, Diepenbeek, Belgium. [Van Elshocht, Sven; Conard, Thierry; Brijs, Bert; Vandervorst, Wilfred; Pourtois, Geoffrey; Kittl, Jorge; Heyns, Marc] IMEC VZW, Heverlee, Belgium. [Knaepen, Werner; Detavernier, Christophe] Univ Ghent, UGHENT, B-9000 Ghent, Belgium. [Vandervorst, Wilfred; Heyns, Marc] Catholic Univ Louvain, Heverlee, Belgium. [Hardy, An] XIOS Hogesch Limburg, Dept IWT, Diepenbeek, Belgium.
URI: http://hdl.handle.net/1942/9286
DOI: 10.1039/B816856C
ISI #: 000263272000010
ISSN: 0959-9428
Category: A1
Type: Journal Contribution
Validation: ecoom, 2010
Appears in Collections: Research publications

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