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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/8745

Title: The influence of geometrical imperfections in micromachined cantilevers on the extracted Young's modulus using a simple model
Authors: Van Barel, Gregory
De Ceuninck, Ward
Witvrouw, Ann
Issue Date: 2008
Publisher: IOP PUBLISHING LTD
Citation: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 18(11). p. 115027-...
Abstract: Surface-micromachined test structures for material property characterization at the micro scale often have geometric imperfections. These imperfections make analytical modeling complex. Using an advanced fabrication process, test structures with minimal under-etching can be fabricated. With the use of these structures, straightforward and more accurate material parameter extraction is possible, as compared to test structures which are fabricated using conventional surface micromachining. This work investigates the influence of imperfections, such as under-etching and dishing, on the extracted Young's modulus using a simple model. The considered one-dimensional analytical model is that of a uniformly loaded cantilever beam with fixed boundary conditions. Very good agreement with this model is possible if the effect of bottom clamping, for which one can easily correct, is canceled out.
Notes: [Van Barel, Gregory; Witvrouw, Ann] IMEC VZW, Interuniv Micro Elect Ctr, B-3001 Louvain, Belgium. [Van Barel, Gregory; De Ceuninck, Ward] Hasselt Univ, Div Mat Phys, B-3590 Diepenbeek, Belgium.
URI: http://hdl.handle.net/1942/8745
DOI: 10.1088/0960-1317/18/11/115027
ISI #: 000260263900027
ISSN: 0960-1317
Category: A1
Type: Journal Contribution
Validation: ecoom, 2009
Appears in Collections: Research publications

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