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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/8569

Title: Optical properties of heavily boron-doped nanocrystalline diamond films studied by spectroscopic ellipsometry
Authors: Zimmer, A.
WILLIAMS, Oliver
HAENEN, Ken
Terryn, H.
Issue Date: 2008
Publisher: AMER INST PHYSICS
Citation: APPLIED PHYSICS LETTERS, 93(13)
Abstract: The optical properties of heavily boron-doped nanocrystalline diamond films grown by microwave plasma enhanced chemical vapor deposition on silicon substrates are presented. The diamond films are characterized by spectroscopic ellipsometry within the midinfrared, visible, and near-ultraviolet regions. The ellipsometric spectra are also found to be best described by a four-phase model yielding access to the optical constants, which are found distinct from previous nanocrystalline diamond literature values. The presence of a subgap absorption yielding high extinction coefficient values defined clearly the boron incorporated films in comparison to both undoped and composite films, while refractive index values are relatively comparable. (C) 2008 American Institute of Physics.
Notes: [Zimmer, A.; Terryn, H.] Vrije Univ Brussels, Res Grp Met Electrochem & Mat Sci, B-1050 Brussels, Belgium. [Williams, O. A.; Haenen, K.] Univ Hasselt, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Williams, O. A.; Haenen, K.] IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium.
URI: http://hdl.handle.net/1942/8569
DOI: 10.1063/1.2990679
ISI #: 000259794100030
ISSN: 0003-6951
Category: A1
Type: Journal Contribution
Validation: ecoom, 2009
Appears in Collections: Research publications

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