Document Server@UHasselt >
Research publications >
Please use this identifier to cite or link to this item:
|Title: ||Energy and mass spectra of ions in triode ion plating of Ti(C,N) coatings|
|Authors: ||Wouters, S|
|Issue Date: ||1995|
|Publisher: ||ELSEVIER SCIENCE SA LAUSANNE|
|Citation: ||SURFACE & COATINGS TECHNOLOGY, 76(1-3). p. 135-141|
|Abstract: ||Ti(C,N) coatings were deposited by triode ion plating in a mixture of argon, acetylene and nitrogen. The acetylene inlet was positioned at two different locations relative to the dense plasma. The energy distribution of selected ions during Ti(CxN1-x) deposition was measured by an energy resolved mass spectrometer. The mass spectra showed wide energy distributions of Ti ions, and energy distributions of other ionized molecules, clusters and radicals. A higher probability of acetylene dissociation with the acetylene inlet directed into the plasma was observed. Preferred orientation, lattice parameters and stress for the Ti(C,N) coatings were measured by X-ray diffraction. The measured compressive stress ranged from 8 to 13 GPa, the microhardness from 0.24 to 0.27 GPa. The scratch-test revealed an adhesion comparable to that of TiN coatings.|
|Notes: ||KATHOLICKE IND HOGESCH LIMBURG,DEPT IND WETENSCHAPPEN TECHNOL,B-3590 DIEPENBEEK,BELGIUM.Wouters, S, LIMBURGS UNIV CENTRUM,INST MAT RES,UNIV CAMPUS,WETENSCHAPSPK,B-3590 DIEPENBEEK,BELGIUM.|
|ISI #: ||A1995TM17900023|
|Type: ||Journal Contribution|
|Appears in Collections: ||Research publications|
Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.