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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/7820

Title: Aqueous chemical solution deposition of ultrathin lanthanide oxide dielectric films
Authors: HARDY, An
Van Elshocht, Sven
D'HAEN, Jan
DOUHERET, Olivier
De Gendt, Stefan
Adelmann, Christoph
Caymax, Matty
Conard, Thierry
Witters, Thomas
Bender, Hugo
Richard, Olivier
Heyns, Marc
D'OLIESLAEGER, Marc
VAN BAEL, Marlies
MULLENS, Jules
Issue Date: 2007
Publisher: MATERIALS RESEARCH SOC
Citation: JOURNAL OF MATERIALS RESEARCH, 22(12). p. 3484-3493
Abstract: Ultrathin lanthanide (Nd, Pr, Eu, Sm) oxide films with functional dielectric properties down to 3.3 nm thickness were deposited by aqueous chemical solution deposition (CSD) onto hydrophilic SiO2/Si substrates. Precursor solutions were prepared from the oxides via an intermediate, solid Ln(III)citrate. A film heat treatment scheme was derived from thermogravimetric analysis of the precursor gels, showing complete decomposition by 600 degrees C. Crystalline phase formation in the films depended on the lanthanide, annealing temperature, and citric acid content in the precursor. Through variation of the precursor concentration and number of deposited layers, thickness series of uniform films were obtained down to similar to 3 nm. The film uniformity was demonstrated both by atomic force microscopy and cross-section transmission electron microscopy. The lanthanide oxide films possessed good dielectric properties. It was concluded that aqueous CSD allows deposition of uniform ultrathin films and may be useful for the evaluation of new high-k candidate materials.
Notes: Hasselt Univ, Mat Res Inst, Lab Inorgan & Phys Chem, B-3590 Diepenbeek, Belgium. IMEC vzw, Div IMOMEC, B-3590 Diepenbeek, Belgium. IMEC vzw, B-3001 Heverlee, Belgium. Katholieke Univ Leuven, Dept Chem, B-3001 Heverlee, Belgium. XIOS Hogesch Limburg, Dept Ind Sci & Technol IWT, B-3590 Diepenbeek, Belgium.Van Bael, MK, Hasselt Univ, Mat Res Inst, Lab Inorgan & Phys Chem, B-3590 Diepenbeek, Belgium.marlies.vanbael@uhasselt.be jules.mullens@uhasselt.be
URI: http://hdl.handle.net/1942/7820
DOI: 10.1557/JMR.2007.0433
ISI #: 000251487100026
ISSN: 0884-2914
Category: A1
Type: Journal Contribution
Validation: ecoom, 2009
Appears in Collections: Research publications

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