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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/7781

Title: Nanocrystalline diamond-based field-effect capacitive pH sensor
Authors: CHRISTIAENS, Pieter
Abouzar, Maryam H.
Poghossian, A.
Wagner, T.
BIJNENS, Nathalie
WILLIAMS, Oliver
DAENEN, Michael
HAENEN, Ken
Schoning, M.J.
WAGNER, Patrick
Issue Date: 2007
Publisher: IEEE
Citation: TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2. p. U954-U955.
Abstract: The pH-sensitive properties of field-effect capacitive electrolyte-diamond-insulator-semiconductor (EDIS) sensors with undoped nanocrystalline diamond (NCD) thin films (100-500 nm) having hydrogen (H)- and oxygen (O)-terminated surfaces have been investigated. The NCD films were grown on P-Si-SiO2 substrates by a microwave plasma-enhanced chemical vapour deposition from a mixture of methane and hydrogen. The EDIS sensors have been characterised by means of capacitance-voltage spectroscopy, constant-capacitance and impedance-spectroscopy method. The developed EDIS sensors with O-terminated and H-terminated NCD surfaces show an average pH sensitivity of 38 mV/pH and 34-36 mV/pH, respectively. A possible mechanism of the pH sensitivity is discussed.
Notes: Hasselt Univ, Inst Mat Res, Diepenbeek, Belgium.Christiaens, P, Hasselt Univ, Inst Mat Res, Diepenbeek, Belgium.
URI: http://hdl.handle.net/1942/7781
ISI #: 000249603700470
ISBN: 978-1-4244-0841-2
Category: C1
Type: Proceedings Paper
Validation: ecoom, 2009
Appears in Collections: Research publications

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