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|Title: ||Nanocrystalline diamond-based field-effect capacitive pH sensor|
|Authors: ||CHRISTIAENS, Pieter|
Abouzar, Maryam H.
|Issue Date: ||2007|
|Citation: ||TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2. p. U954-U955.|
|Abstract: ||The pH-sensitive properties of field-effect capacitive electrolyte-diamond-insulator-semiconductor (EDIS) sensors with undoped nanocrystalline diamond (NCD) thin films (100-500 nm) having hydrogen (H)- and oxygen (O)-terminated surfaces have been investigated. The NCD films were grown on P-Si-SiO2 substrates by a microwave plasma-enhanced chemical vapour deposition from a mixture of methane and hydrogen. The EDIS sensors have been characterised by means of capacitance-voltage spectroscopy, constant-capacitance and impedance-spectroscopy method. The developed EDIS sensors with O-terminated and H-terminated NCD surfaces show an average pH sensitivity of 38 mV/pH and 34-36 mV/pH, respectively. A possible mechanism of the pH sensitivity is discussed.|
|Notes: ||Hasselt Univ, Inst Mat Res, Diepenbeek, Belgium.Christiaens, P, Hasselt Univ, Inst Mat Res, Diepenbeek, Belgium.|
|ISI #: ||000249603700470|
|Type: ||Proceedings Paper|
|Validation: ||ecoom, 2009|
|Appears in Collections: ||Research publications|
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