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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/6305

Title: A simple diffusion model of surface modification by plasma
Authors: Dimitrov, V.I.
D' HAEN, Jan
KNUYT, Gilbert
STALS, Lambert
Issue Date: 1997
Citation: Physica status solidi A, 159(2). p. 405-416
Abstract: A simple two-media diffusion model of thin film deposition on material surfaces by plasma techniques has been developed. In accordance with the model the modified surface is considered to be constituted of a united compound layer, adjacent to a diffusion zone. The layer thicknesses of the zones, as functions of time, are described by a simple differential equation: dg/dt = /g - , where and are parameters of the zones. Parameter takes into account the diffusion contribution to the layer thickness growth, parameter the contribution of the surface erosion arising at the plasma/solid surface during the plasma treatment. Under negligible erosion effects, the model reduces to Wagner's two-phase diffusion model, and the thickness growth is described by the parabolic law. The model can be used for an experimental determination of the effective diffusion coefficients and the erosion rate during plasma treatment of material surfaces.
URI: http://hdl.handle.net/1942/6305
DOI: 10.1002/1521-396X(199702)159:2<405::AID-PSSA405>3.0.CO;2-3
Type: Journal Contribution
Appears in Collections: Research publications

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