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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/5932

Title: Surface acoustic wave propagation in aluminium nitride-unpolished freestanding diamond structures
Authors: MORTET, Vincent
Elmazria, O.
NESLADEK, Milos
Assouar, Mohamed B.
VANHOYLAND, Geert
D'HAEN, Jan
D'OLIESLAEGER, Marc
Alnot, P.
Issue Date: 2002
Publisher: AMER INST PHYSICS
Citation: Applied physics letters, 8(9). p. 1720-1722
Abstract: High-quality surface acoustic wave (SAW) filters based on aluminum nitride (AlN)/diamond layered structures were prepared using the nucleation side of polycrystalline chemical vapor deposition (CVD) diamond, removed from a silicon substrate by wet etching. Highly oriented AlN thin films with optimized piezoelectric properties and with various thicknesses were sputtered onto the nucleation side of freestanding diamond. The effect of AlN thickness on the SAW phase velocity, the coupling coefficient, and the device characteristics were investigated. Experimental results show that the Rayleigh wave and the higher modes are generated. These results agree well with calculated dispersion curves and demonstrate that a high electromechanical coupling coefficient together with a high phase velocity can be obtained by using the nucleation side of freestanding CVD diamond laye
URI: http://hdl.handle.net/1942/5932
DOI: 10.1063/1.1503875
ISI #: 000177549200060
ISSN: 0003-6951
Category: A1
Type: Journal Contribution
Validation: ecoom, 2003
Appears in Collections: Research publications

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