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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/4938

Title: Super secondary grain growth in the barrier/seedlayer system
Authors: VANSTREELS, Kris
Brongersma, S.H.
Demuynck, S.
D'HAEN, Jan
DE CEUNINCK, Ward
D'OLIESLAEGER, Marc
Maex, Karen
Issue Date: 2004
Publisher: MATERIALS RESEARCH SOCIETY
Citation: Proceedings of the Advanced Metallization Conference 2004, San Diego, Calif., USA, October 19-21. p. 327-331.
Abstract: A new grain growth mode is observed in thick copper seed layers deposited on alpha-Ta barriers. It leads to highly concentric growth and grains of many tens of microns. Initiation and growth of the grains is shown to be dependent on both the barrier properties and the copper layer thickness. A clear rivalry between this growth mode and normal secondary grain growth is observed, where the latter dominates at elevated temperatures. Also the final grain orientations are very different as no (111) growth is observed for the new mechanism.
URI: http://hdl.handle.net/1942/4938
ISI #: 000228037200043
ISBN: 1-55899-814-4
Category: C1
Type: Proceedings Paper
Validation: ecoom, 2006
Appears in Collections: Research publications

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