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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/4110

Title: Synthesis of thin dense titania films via an aqueous solution-gel method
Authors: TRUIJEN, Ine
VAN BAEL, Marlies
VAN DEN RUL, Heidi
D'HAEN, Jan
MULLENS, Jules
Issue Date: 2007
Publisher: SPRINGER
Citation: JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 41(1). p. 43-48
Abstract: Nanostructured titanium dioxide films have been reported to be used in many applications ranging from optics and solar energy devices to gas sensors. This work describes the synthesis of nanocrystalline titania films via an aqueous solution-gel method. The thin films are deposited by spin coating an aqueous citratoperoxo-Ti(IV)-precursor solution onto a silicon substrate. The influence of processing parameters like Ti4+ concentration and crystallization temperature on the phase formation, crystallite size and surface morphology of the films is studied by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and atomic force microscopy (AFM). Furthermore, the effect of successive layer deposition on the film thickness of the resulting films is studied by means of cross sectional SEM. SEM and TEM micrographs clearly show that, after optimization of the process parameters, thin, smooth, dense nanocrystalline films are synthesized in a reproducible manner. The films are composed of 15-20 nm grains. At higher crystallization temperatures (600, 650 degrees C) also larger particles (40-70 nm) are present. XRD data reveal that a phase pure anatase film is formed at 450 degrees C. Crystallization temperatures equal to or higher than 600 degrees C however give rise to the formation of both the anatase and rutile crystalline phases. The smoothness of the films is proved by their very low rms surface roughness (<= 1.1 nm) measured by AFM.
Notes: Hasselt Univ, Inst Mat Res, B-3590 Diepenbeek, Belgium. IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium.MULLENS, J, Hasselt Univ, Inst Mat Res, Agroralaan Bldg D, B-3590 Diepenbeek, Belgium.jules.mullens@uhasselt.be
URI: http://hdl.handle.net/1942/4110
DOI: 10.1007/s10971-006-0123-8
ISI #: 000243190300006
ISSN: 0928-0707
Category: A1
Type: Journal Contribution
Validation: ecoom, 2008
Appears in Collections: Research publications

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