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|Title: ||STUDY OF THE ION ENERGY-DISTRIBUTION DURING PHYSICAL VAPOR-DEPOSITION OF TIN|
|Authors: ||NESLADEK, Milos|
|Issue Date: ||1994|
|Publisher: ||ELSEVIER SCIENCE SA LAUSANNE|
|Citation: ||SURFACE & COATINGS TECHNOLOGY, 68. p. 339-343|
|Abstract: ||The energetic distribution of ions in a triode ion plating configuration during TiN deposition was investigated. The fluxes of different ions such as Ti+, N+, N-2(+), TiN+, TiAr+ impinging on the substrate, for various N partial pressures were measured by mass-energy spectrometry. The potential distribution in the plasma and the total ion flux towards the substrate were evaluated by Langmuir plasma probing. A model of the potential distribution in the triode ion plating plasma configuration is suggested and the Ti ionization for various plasma conditions is discussed.|
|Notes: ||BALZERS AG,FL-9496 BALZERS,LIECHTENSTEIN.NESLADEK, M, LIMBURGS UNIV CENTRUM,INST MAT RES,DIV MAT PHYS,SCI PK,CAMPUSLAAN,B-3590 DIEPENBEEK,BELGIUM.|
|ISI #: ||A1994PW03900056|
|Type: ||Journal Contribution|
|Appears in Collections: ||Research publications|
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