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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/3817

Title: STUDY OF THE ION ENERGY-DISTRIBUTION DURING PHYSICAL VAPOR-DEPOSITION OF TIN
Authors: NESLADEK, Milos
QUAEYHAEGENS, Carl
WOUTERS, S
STALS, Lambert
Bergmann, E.
RETTINGHAUS, G
Issue Date: 1994
Publisher: ELSEVIER SCIENCE SA LAUSANNE
Citation: SURFACE & COATINGS TECHNOLOGY, 68. p. 339-343
Abstract: The energetic distribution of ions in a triode ion plating configuration during TiN deposition was investigated. The fluxes of different ions such as Ti+, N+, N-2(+), TiN+, TiAr+ impinging on the substrate, for various N partial pressures were measured by mass-energy spectrometry. The potential distribution in the plasma and the total ion flux towards the substrate were evaluated by Langmuir plasma probing. A model of the potential distribution in the triode ion plating plasma configuration is suggested and the Ti ionization for various plasma conditions is discussed.
Notes: BALZERS AG,FL-9496 BALZERS,LIECHTENSTEIN.NESLADEK, M, LIMBURGS UNIV CENTRUM,INST MAT RES,DIV MAT PHYS,SCI PK,CAMPUSLAAN,B-3590 DIEPENBEEK,BELGIUM.
URI: http://hdl.handle.net/1942/3817
ISI #: A1994PW03900056
ISSN: 0257-8972
Type: Journal Contribution
Appears in Collections: Research publications

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