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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/3313

Title: The thermally balanced bridge technique (TBBT): A new high resolution resistometric measurement technique for the study of electromigration-induced early resistance changes in metal stripes
Authors: VAN OLMEN, Jan
DE CEUNINCK, Ward
DE SCHEPPER, Luc
GOLDONI, Alessandro
Cervini, A
Fantini, F
Issue Date: 1997
Publisher: PERGAMON-ELSEVIER SCIENCE LTD
Citation: MICROELECTRONICS AND RELIABILITY, 37(10-11). p. 1483-1486
Abstract: A new high resolution resistometric measurement technique has been developed in order to perform accurate early resistance change measurements on metal lines submitted to high current densities. This new technique consists of a refined bridge technique resulting in resistance change curves showing only electron-wind induced resistance changes. When performed in a furnace with a high temperature stability the resistance change curves of the individual stripes (test and reference) can be monitored individually with a high resolution.
Notes: DESTIN NV,B-3590 DIEPENBEEK,BELGIUM. UNIV PARMA,DIPARTIMENTO INGN INFORMAZ,I-43100 PARMA,ITALY.VanOlmen, J, LIMBURGS UNIV CTR,INST MAT RES,DIV MAT PHYS,UNIV CAMPUS,WETENSCHAPSPK 1,B-3590 DIEPENBEEK,BELGIUM.
URI: http://hdl.handle.net/1942/3313
DOI: 10.1016/S0026-2714(97)00091-7
ISI #: A1997YB68300016
ISSN: 0026-2714
Type: Journal Contribution
Appears in Collections: Research publications

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