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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/3254

Title: Nucleation and orientation of sol-gel PZT-films on Pt electrodes
Authors: Willems, GJ
Wouters, DJ
Maes, HE
NOUWEN, Ria
Issue Date: 1997
Publisher: GORDON BREACH SCI PUBL LTD
Citation: INTEGRATED FERROELECTRICS, 15(1-4). p. 19-28
Abstract: The nucleation and preferential orientation of Lead Zirconate-Titanate (PZT) films deposited by sol-gel spin-coating on Pt bottom electrodes is discussed. The crucial role of the Ti adhesion layer is highlighted. A qualitative crystallization model is presented which can explain the nucleation behavior of PZT-films with different Zr/Ti-ratios on different electrode structures as well as the preferential orientation of the PZT-film.
Notes: LIMBURGS UNIV CTR,B-3590 DIEPENBEEK,BELGIUM.Willems, GJ, IMEC,KAPELDREEF 75,B-3001 LOUVAIN,BELGIUM.
URI: http://hdl.handle.net/1942/3254
DOI: 10.1080/10584589708015693
ISI #: A1997WR71500004
ISSN: 1058-4587
Type: Journal Contribution
Appears in Collections: Research publications

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