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|Title: ||Nucleation and orientation of sol-gel PZT-films on Pt electrodes|
|Authors: ||Willems, GJ|
|Issue Date: ||1997|
|Publisher: ||GORDON BREACH SCI PUBL LTD|
|Citation: ||INTEGRATED FERROELECTRICS, 15(1-4). p. 19-28|
|Abstract: ||The nucleation and preferential orientation of Lead Zirconate-Titanate (PZT) films deposited by sol-gel spin-coating on Pt bottom electrodes is discussed. The crucial role of the Ti adhesion layer is highlighted. A qualitative crystallization model is presented which can explain the nucleation behavior of PZT-films with different Zr/Ti-ratios on different electrode structures as well as the preferential orientation of the PZT-film.|
|Notes: ||LIMBURGS UNIV CTR,B-3590 DIEPENBEEK,BELGIUM.Willems, GJ, IMEC,KAPELDREEF 75,B-3001 LOUVAIN,BELGIUM.|
|ISI #: ||A1997WR71500004|
|Type: ||Journal Contribution|
|Appears in Collections: ||Research publications|
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