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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/3235

Title: Quantitation of major elements with secondary ion mass spectrometry by using M-2(+)-molecular ions
Authors: VLEKKEN, Johan
WU, Ting-Di
D'OLIESLAEGER, Marc
KNUYT, Gilbert
Vandervorst, W
DE SCHEPPER, Luc
Issue Date: 1998
Publisher: ELSEVIER SCIENCE INC
Citation: JOURNAL OF THE AMERICAN SOCIETY FOR MASS SPECTROMETRY, 9(6). p. 638-642
Abstract: A new quantitation method, based on the detection of M-2(+) molecular ions, is presented. It has been shown that M-2(+) molecular ions are formed by a recombination process between independently sputtered M and M+ particles. Based on this formation mechanism, it will be demonstrated that M-2(+) molecular ions can be used to quantitate major elements. The method will be used for quantitation of an AlxGa1-xAs multilayer. Furthermore, it will be shown that some matrix effects can be explained by the energy dependence of instrument transmission. (C) 1998 American Society for Mass Spectrometry.
Notes: Limburgs Univ Ctr, Inst Mat Res, Div Mat Phys, B-3590 Diepenbeek, Belgium. IMEC VZW, Leuven, Belgium.Vlekken, J, Limburgs Univ Ctr, Inst Mat Res, Div Mat Phys, Univ Campus,Wetenschapspark 1, B-3590 Diepenbeek, Belgium.
URI: http://hdl.handle.net/1942/3235
DOI: 10.1016/S1044-0305(98)00028-2
ISI #: 000073734700010
ISSN: 1044-0305
Type: Journal Contribution
Validation: ecoom, 1999
Appears in Collections: Research publications

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