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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/3158

Title: Generalized Wagner's diffusion model of surface modification of materials by plasma diffusion treatment
Authors: Dimitrov, VI
KNUYT, Gilbert
STALS, Lambert
D'HAEN, Jan
QUAEYHAEGENS, Carl
Issue Date: 1998
Publisher: SPRINGER VERLAG
Citation: APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 67(2). p. 183-192
Abstract: A general model of surface modification of materials by plasma diffusion techniques has been developed. This model takes into account the erosion effects at the plasma/solid interface occurring due to the ion bombardment of the surface. For constant sputtering rate, which is the usual situation during plasma treatment, the growth of the sub-layers (and the total compound layer) is well described by the analytical expression g(t) = g(0) f(-1) (t/t(0)), where g(t) is the sub-layer thickness at time t, g(0) and t(0) are parameters that depend on the treated material and plasma characteristics, and f(-1) is the inverse function of f(x) = -(ln(1 - x) + x), where x = g(t)/g(0), 0 less than or equal to x less than or equal to 1. Under negligible erosion effects, the model becomes of Wagner's diffusion model type and the expression for g(t) reduces to the parabolic law. The model can be simplified by considering the compound layer as a united one. The general and simplified models can be used as a method for the experimental determining of the effective diffusion coefficients and the erosion rate during plasma treatment of material surfaces.
Notes: Limburgs Univ Ctr, Inst Mat Res, Div Mat Phys, B-3590 Diepenbeek, Belgium.Dimitrov, VI, Univ Sofia, Fac Phys, Dept Solid State Phys, 5 J Bouchier Bld, BG-1126 Sofia, Bulgaria.
URI: http://hdl.handle.net/1942/3158
DOI: 10.1007/s003390050757
ISI #: 000075131700009
ISSN: 0947-8396
Type: Journal Contribution
Validation: ecoom, 1999
Appears in Collections: Research publications

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