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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/3079

Title: Investigation of the formation of M-2(+)-molecular ions in sputtering processes
Authors: VLEKKEN, Johan
CROES, Kristof
WU, Ting-Di
D'OLIESLAEGER, Marc
KNUYT, Gilbert
Vandervorst, W
DE SCHEPPER, Luc
Issue Date: 1999
Publisher: ELSEVIER SCIENCE INC
Citation: JOURNAL OF THE AMERICAN SOCIETY FOR MASS SPECTROMETRY, 10(3). p. 246-253
Abstract: The formation process of M-2(+) molecular ions sputtered from elementary target materials is investigated. in a previous article it was shown that these molecules can be used to quantitate major elements [1]. The quantitation method was based on the assumption that the M-2(+) molecular ions are formed by the atomic combination of independently sputtered M and M+ particles above the surface. In this paper this assumption will be investigated using a Monte Carlo model to simulate the formation mechanism. The model is used to calculate the velocity distribution of the M: dimers sputtered from three different elementary target materials (Fe, Ge, and Ni). The results are compared with experimental data. Good agreement exists between theory and experiment that supports the Monte Carlo model and hence also the assumed formation mechanism. (C) 1999 American Society for Mass Spectrometry.
Notes: Limburgs Univ Ctr, Inst Mat Res, Div Mat Phys, B-3590 Diepenbeek, Belgium. IMEC VZW, B-3001 Louvain, Belgium.Vlekken, J, Limburgs Univ Ctr, Inst Mat Res, Div Mat Phys, Univ Campus,Wetenschapspk 1, B-3590 Diepenbeek, Belgium.
URI: http://hdl.handle.net/1942/3079
DOI: 10.1016/S1044-0305(98)00143-3
ISI #: 000078807100007
ISSN: 1044-0305
Type: Journal Contribution
Validation: ecoom, 2000
Appears in Collections: Research publications

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