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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/2505

Title: Aqueous chemical solution deposition of ferroelectric thin films
Authors: VAN BAEL, Marlies
NELIS, Daniel
HARDY, An
MONDELAERS, Dirk
VAN WERDE, Kristof
D'HAEN, Jan
VANHOYLAND, Geert
VAN DEN RUL, Heidi
MULLENS, Jules
VAN POUCKE, Lucien
Frederix, F
Wouters, DJ
Issue Date: 2002
Publisher: TAYLOR & FRANCIS LTD
Citation: INTEGRATED FERROELECTRICS, 45. p. 113-122
Abstract: Thin films of various ferroelectric multimetal oxides such as (Bi1-xLax)(4)Ti3O12(BLT), SrBi2Ta2O9 (SBT) and PbZr1-xTixO3 (PZT) have been prepared by an entirely aqueous chemical solution deposition (CSD) route. Two critical issues related with aqueous CSD have hereby been worked out: in spite of the high degree of hydrolysis of tetra- and pentavalent metal ions (Ti4+ , Zr4+ , Ta5+, ...) we managed to prepare stable aqueous precursor solutions by chemical modification of these individual metals, avoiding phase segregation. Another problem related with aqueous CSD is the wetting of the substrate (both metallic and metal oxide) by the aqueous solution. The hydrophilicity of the substrates is optimized by a chemical treatment of the substrate surface. In this manner, the addition of wetting agents, hence possibly disturbing the gelation reactions, is avoided. In order to study the gelation, decomposition, crystalization and the morphology of the thin films, various characterization techniques ((cryo-)TEM, SEM, EDX, TGA-MS/FTIR, HT-DRIFT, HT-XRD, ...) are used.
Notes: Limburgs Univ Ctr, Lab Inorgan & Phys Chem, IMO, B-3590 Diepenbeek, Belgium. Limburgs Univ Ctr, IMOMEC, IMO, B-3590 Diepenbeek, Belgium. Limburgs Univ Ctr, Phys Anal Grp, IMO, B-3590 Diepenbeek, Belgium. IMEC, B-3001 Heverlee, Belgium.Van Bael, MK, Limburgs Univ Ctr, Lab Inorgan & Phys Chem, IMO, B-3590 Diepenbeek, Belgium.
URI: http://hdl.handle.net/1942/2505
ISI #: 000179828300015
ISSN: 1058-4587
Category: A1
Type: Journal Contribution
Validation: ecoom, 2004
Appears in Collections: Research publications

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