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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/2409

Title: MTF test system with AC based dynamic joule correction for electromigration tests on interconnects
Authors: BIESEMANS, Leen
Schepers, K
VANSTREELS, Kris
D'HAEN, Jan
DE CEUNINCK, Ward
D'OLIESLAEGER, Marc
Issue Date: 2004
Publisher: PERGAMON-ELSEVIER SCIENCE LTD
Citation: MICROELECTRONICS RELIABILITY, 44(9-11). p. 1849-1854
Abstract: For accelerated electromigration tests to be accurately measured and extrapolated, the sample temperature has to remain constant during the entire test. Conventional Median Time to Failure (MTF) test systems take the joule heating into account only at the beginning of the test, which is not sufficient. A solution to this problem was formulated by Scandurra et al. by introducing a DC-current based dynamic joule correction. In this paper, a new test system has been developed which makes use of an AC-current based dynamic joule correction. In this way, no electromigration effects take place during the determination of the thermal resistance. (C) 2004 Elsevier Ltd. All-rights-reserved.
Notes: Limburgs Univ Ctr, Inst Mat Res, B-3590 Diepenbeek, Belgium. IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium. Hsch Limburg, B-3590 Diepenbeek, Belgium.Biesemans, L, Limburgs Univ Ctr, Inst Mat Res, Wetenschapspk 1, B-3590 Diepenbeek, Belgium.
URI: http://hdl.handle.net/1942/2409
DOI: 10.1016/j.microrel.2004.07.096
ISI #: 000224280000097
ISSN: 0026-2714
Category: A1
Type: Journal Contribution
Validation: ecoom, 2005
Appears in Collections: Research publications

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