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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/2325

Title: Advantage of In-situ over Ex-situ techniques as reliability tool: Aging kinetics of Imec's MCM-D discrete passives devices.
Authors: Soussan, P
LEKENS, Geert
DREESEN, Raf
DE CEUNINCK, Ward
Beyne, E
Issue Date: 2003
Publisher: PERGAMON-ELSEVIER SCIENCE LTD
Citation: MICROELECTRONICS RELIABILITY, 43(9-11). p. 1785-1790
Abstract: An in-situ technique has been used to characterize Imec's MCM-D technology. This thin film technology dedicated to high frequency applications - uses exotic materials such as TaN and Ta2O5 for the resistors and the capacitors respectively. It was characterized at elevated temperature (up to 200degreesC), and it was possible to model the aging kinetics of the resistors and to use the high resolution measurements as a powerful analysis tool for the capacitors. With respect to conventional reliability testing, the in-situ technique was proven to be an efficient way to assess technology characterization and reliability; moreover, it gives the possibility to use short accelerated tests to perform lifetime prediction. (C) 2003 Elsevier Ltd. All rights reserved.
Notes: IMEC VZW, MCP, EDAS, B-3001 Louvain, Belgium. IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium. XPEQT, B-3980 Tessenderlo, Belgium.Soussan, P, IMEC VZW, MCP, EDAS, Kapeldreef 75, B-3001 Louvain, Belgium.
URI: http://hdl.handle.net/1942/2325
DOI: 10.1016/S0026-2714(03)00301-9
ISI #: 000185791500072
ISSN: 0026-2714
Category: A1
Type: Journal Contribution
Validation: ecoom, 2004
Appears in Collections: Research publications

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