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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/22735

Title: The pressure sensitivity of wrinkled B-doped nanocrystalline diamond membranes
Authors: Drijkoningen, Sien
Janssens, S.D.
Pobedinskas, Paulius
Koizumi, S.
Van Bael, M. K.
Haenen, Ken
Issue Date: 2016
Citation: SCIENTIFIC REPORTS, 6 (Art N° 35667)
Abstract: Nanocrystalline diamond (NCD) membranes are promising candidates for use as sensitive pressure sensors. NCD membranes are able to withstand harsh conditions and are easily fabricated on glass. In this study the sensitivity of heavily boron doped NCD (B:NCD) pressure sensors is evaluated with respect to different types of supporting glass substrates, doping levels and membrane sizes. Higher pressure sensing sensitivities are obtained for membranes on Corning Eagle 2000 glass, which have a better match in thermal expansion coefficient with diamond compared to those on Schott AF45 glass. In addition, it is shown that larger and more heavily doped membranes are more sensitive. After fabrication of the membranes, the stress in the B:NCD films is released by the emergence of wrinkles. A better match between the thermal expansion coefficient of the NCD layer and the underlying substrate results in less stress and a smaller amount of wrinkles as confirmed by Raman spectroscopy and 3D surface imaging.
Notes: [Drijkoningen, S.; Janssens, S. D.; Pobedinskas, P.; Van Bael, M. K.; Haenen, K.] Hasselt Univ, Inst Mat Res IMO, Diepenbeek, Belgium. [Drijkoningen, S.; Janssens, S. D.; Van Bael, M. K.; Haenen, K.] IMEC VZW, IMOMEC, Diepenbeek, Belgium. [Janssens, S. D.; Koizumi, S.] NIMS, Tsukuba, Ibaraki, Japan. [Koizumi, S.] Japan Sci & Technol Agcy JST AIST, Core Res Evolut Sci & Technol CREST, Tsukuba, Ibaraki, Japan.
URI: http://hdl.handle.net/1942/22735
DOI: 10.1038/srep35667
ISI #: 000385830100001
ISSN: 2045-2322
Category: A1
Type: Journal Contribution
Validation: ecoom, 2017
Appears in Collections: Research publications

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