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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/22608

Title: Ultrasonic Spray Deposition of Metal Oxide Films on High Aspect Ratio Microstructures for 3D All-solid-state Li-ion Batteries
Authors: van den Ham, Jonathan
Gielis, Sven
Van Bael, Marlies K.
Hardy, An
Issue Date: 2016
Citation: ACS Energy Letters, 1, p. 1184-1188
Abstract: Deposition of functional materials on non-planar surfaces remains a challenge for various applications, among which 3D all-solid-state Li-ion batteries. In this letter we present a new process to deposit functional oxide materials on high aspect ratio microstructures, without the use of vacuum-based deposition methods. Using ultrasonic spray deposition in combination with metal citrate chemistry, we were able to deposit high quality coatings on Si micro-cylinders with an aspect ratio of 10. These results were achieved by controlling the precursor chemistry, wetting properties, gel mobility and precursor decomposition. The versatility of the process was shown by depositing titanium oxide (TiO2), lithium lanthanum titanate (Li0.35La0.55TiO3) and tungsten oxide (WO3) on Si micro-cylinders of 50 μm length, with an inter-cylinder distance of 5 μm. Finally, a proof of the 3D battery concept was achieved by coating of TiN / Si micro-cylinders with WO3 using a minimized thermal budget to preserve the (oxidative) TiN current collector. This led to an almost threefold electrode capacity enhancement per footprint area, due to the high surface to bulk ratio of the 3D coating. Therefore, these results form a breakthrough in the field of solution-processing of non-planar microstructures. In addition, the flexibility, low-cost character and high up-scaling potential of this approach is very promising for various applications requiring coated 3D microstructures.
URI: http://hdl.handle.net/1942/22608
DOI: 10.1021/acsenergylett.6b00449
ISI #: 000390086400018
ISSN: 2380-8195
Category: A2
Type: Journal Contribution
Appears in Collections: Research publications

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