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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/22049

Title: Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H-2/N-2 plasma enhanced chemical vapor deposition
Authors: Ficek, Mateusz
Kamatchi Jothiramalingam, Sankaran
Ryl, Jacek
Bogdanowicz, Robert
Lin, I-Nan
Haenen, Ken
Darowicki, Kazimierz
Issue Date: 2016
Publisher: AMER INST PHYSICS
Citation: APPLIED PHYSICS LETTERS, 108(24) (Art N° 241906)
Abstract: The influence of N-2 concentration ( 1%-8%) in CH4/H-2/N-2 plasma on structure and optical properties of nitrogen doped diamond ( NDD) films was investigated. Thickness, roughness, and optical properties of the NDD films in the VIS-NIR range were investigated on the silicon substrates using spectroscopic ellipsometry. The samples exhibited relatively high refractive index ( 2.6+/-0.25 at 550nm) and extinction coefficient ( 0.05+/-0.02 at 550nm) with a transmittance of 60%. The optical investigation was supported by the molecular and atomic data delivered by Raman studies, bright field transmission electron microscopy imaging, and X-ray photoelectron spectroscopy diagnostics. Those results revealed that while the films grown in CH4/H-2 plasma contained micron-sized diamond grains, the films grown using CH4/H-2/(4%)N-2 plasma exhibited ultranano-sized diamond grains along with n-diamond and i-carbon clusters, which were surrounded by amorphous carbon grain boundaries. Published by AIP Publishing.
Notes: [Ficek, Mateusz; Bogdanowicz, Robert] Gdansk Univ Technol, Dept Metrol & Optoelect, Fac Elect Telecommun & Informat, 11-12 G Narutowicza St, PL-80233 Gdansk, Poland. [Ficek, Mateusz; Sankaran, Kamatchi J.; Haenen, Ken] Hasselt Univ, Inst Mat Res IMO, Wetenschapspk 1, B-3590 Diepenbeek, Belgium. [Sankaran, Kamatchi J.; Haenen, Ken] IMEC VZW, IMOMEC, Wetenschapspk 1, B-3590 Diepenbeek, Belgium. [Ryl, Jacek; Darowicki, Kazimierz] Gdansk Univ Technol, Dept Electrochem Corros & Mat Engn, 11-12 Narutowicza St, PL-80233 Gdansk, Poland. [Bogdanowicz, Robert] CALTECH, Mat & Proc Simulat Ctr, Pasadena, CA 91125 USA. [Lin, I-Nan] Tamkang Univ, Dept Phys, Tamsui 251, Taiwan.
URI: http://hdl.handle.net/1942/22049
DOI: 10.1063/1.4953779
ISI #: 000379037200020
ISSN: 0003-6951
Category: A1
Type: Journal Contribution
Validation: ecoom, 2017
Appears in Collections: Research publications

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