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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/20809

Title: Sol–Gel Deposition of Ultrathin High-κ Dielectric Films
Authors: Hardy, An
Van Bael, Marlies K.
Issue Date: 2015
Publisher: Wiley VCH Verlag
Citation: Levy, David; Zayat, Marcos (Ed.). The Sol-Gel Handbook: Synthesis, Characterization and Applications, 3-Volume Set, p. 767-786
URI: http://hdl.handle.net/1942/20809
ISBN: 978-3-527-33486-5
Category: B2
Type: Book Section
Appears in Collections: Research publications

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