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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/18762

Title: Rapid fabrication of micron-sized CVD-diamond structures by microfluidic contact printing
Authors: VANDENRYT, Thijs
GRIETEN, Lars
JANSSENS, Stoffel
VAN GRINSVEN, Bart
HAENEN, Ken
RUTTENS, Bart
D'Haen, Jan
WAGNER, Patrick
THOELEN, Ronald
DE CEUNINCK, Ward
Issue Date: 2014
Publisher: WILEY-V C H VERLAG GMBH
Citation: PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 211 (6), p. 1448-1454
Abstract: In this contribution we report on a novel method for the growth of laterally patterned synthetic diamond films with submicron feature sizes. The lateral patterning is induced by depositing a nanodiamond-based seeding layer prior to the chemical vapor deposition of the diamond films. The seeding layer is prepared by a microfluidic approach, based on soft lithography with PDMS moulds, used in the microcontact printing. These moulds are prepared by electron-beam lithography of photoresist on silicon substrates. The master moulds are reusable, allowing for cheap, high-throughput manufacturing, and the resulting diamond microstructures exhibit an outstanding smoothness and structural reproducibility. Possible applications are expected in the fields of diamond electronics, micro-electro-mechanical systems (MEMS) as well as bio- and chemosensors. The abstract figure shows the SU-8 master mould (left). The resulting diamond structure (right) is shown, after chemical vapor deposition. The purple color originates from the settings of the optical microscope, used to get a high-contrast image. (C) 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Notes: [Vandenryt, Thijs; Grieten, Lars; Janssens, Stoffel D.; van Grinsven, Bart; Haenen, Ken; Ruttens, Bart; D'Haen, Jan; Wagner, Patrick; Thoelen, Ronald; De Ceuninck, Ward] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Janssens, Stoffel D.; Haenen, Ken; Ruttens, Bart; D'Haen, Jan; Wagner, Patrick; De Ceuninck, Ward] IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium.
URI: http://hdl.handle.net/1942/18762
DOI: 10.1002/pssa.201330665
ISI #: 000337759000036
ISSN: 1862-6300
Category: A1
Type: Journal Contribution
Validation: ecoom, 2015
Appears in Collections: Research publications

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