www.uhasselt.be
DSpace

Document Server@UHasselt >
Research >
Research publications >

Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/18717

Title: Ultra high amorphous silicon passivation quality of crystalline silicon surface using in-situ post-deposition treatments
Authors: Meddeb, H.
Bearda, Twan
Dimassi, Wissem
Abdulraheem, Yaser
Ezzaouia, Hatem
Gordon, Ivan
Szlufcik, Jozef
POORTMANS, Jef
Issue Date: 2015
Publisher: WILEY-V C H VERLAG GMBH
Citation: PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 9 (1), p. 53-56
Abstract: A parametric study of post-deposition hydrogen plasma treatment of intrinsic a:Si:H films is performed. We demonstrate a significant improvement in passivation of c-Si(100) promoting epitaxy after an in-situ hydrogen plasma treatment depending mainly on the pressure and slightly on the power. Plasma diagnostic indicates an increase of H* signal with high power and low pressure. However, our analysis reveals a better hydrogen incorporation with high pressure and a slight increase in monohydride with high power. Longer H-2 plasma duration up to 50 s shows no detrimental effect on the passivation quality. Optimizing the in-situ H-2 plasma treatment, high minority carrier lifetime over 15 ms was achieved after short thermal annealing. ((c) 2015 WILEY-VCH Verlag GmbH &Co. KGaA, Weinheim)
Notes: [Meddeb, H.] Ctr Excellence Nanomfg Applicat CENA, KACST Intel Consortium, Riyadh, Saudi Arabia. [Meddeb, H.; Bearda, Twan; Gordon, Ivan; Szlufcik, Jozef; Poortmans, Jef] IMEC, B-3001 Heverlee, Belgium. [Meddeb, H.; Dimassi, Wissem; Ezzaouia, Hatem] Res & Technol Ctr Energy, Photovolta Dept, Hammam Lif 2050, Tunisia. [Meddeb, H.] Univ Carthage, Fac Sci Bizerta, Carthage, Tunisia. [Abdulraheem, Yaser] Kuwait Univ, Dept Elect Engn, Coll Engn & Petr, Safat 13060, Kuwait. [Poortmans, Jef] Univ Hasselt, Fac Sci, B-3500 Hasselt, Belgium. hosny.meddeb@gmail.com
URI: http://hdl.handle.net/1942/18717
DOI: 10.1002/pssr.201409494
ISI #: 000348763500008
ISSN: 1862-6254
Category: A1
Type: Journal Contribution
Validation: ecoom, 2016
Appears in Collections: Research publications

Files in This Item:

Description SizeFormat
published version464.85 kBAdobe PDF

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.