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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/17172

Title: Substitutional phosphorus incorporation in nanocrystalline CVD diamond thin films
Authors: JANSSEN, Wiebke
TURNER, Stuart
Sakr, Georges
Jomard, Franois
Barjon, Julien
DEGUTIS, Giedrius
Lu, Ying-Gang
D'HAEN, Jan
HARDY, An
VAN BAEL, Marlies
Verbeeck, Johan
Van Tendeloo, Gustaaf
HAENEN, Ken
Issue Date: 2014
Publisher: WILEY-V C H VERLAG GMBH
Citation: PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 8 (8), p. 705-709
Abstract: Nanocrystalline diamond (NCD) thin films were produced by chemical vapor deposition (CVD) and doped by the addition of phosphine to the gas mixture. The characterization of the films focused on probing the incorporation and distribution of the phosphorus (P) dopants. Electron microscopy evaluated the overall film morphology and revealed the interior structure of the nanosized grains. The homogeneous films with distinct diamond grains featured a notably low sp(2):sp(3)-ratio as confirmed by Raman spectroscopy. High resolution spectroscopy methods demonstrated a homogeneous P-incorporation, both in-depth and in-plane. The P concentration in the films was determined to be in the order of 10(19) cm(-3) with a significant fraction integrated at substitutional donor sites. (C) 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Notes: [Janssen, Wiebke; Degutis, Giedrius; D'Haen, Jan; Hardy, An; Van Bael, Marlies; Haenen, Ken] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Janssen, Wiebke; D'Haen, Jan; Hardy, An; Van Bael, Marlies; Haenen, Ken] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium. [Turner, Stuart; Lu, Ying-Gang; Verbeeck, Johan; Van Tendeloo, Gustaaf] Univ Antwerp, EMAT, B-2020 Antwerp, Belgium. [Sakr, Georges; Jomard, Franois; Barjon, Julien] Univ Versailles St Quentin, CNRS, GEMaC, F-78035 Versailles, France.
URI: http://hdl.handle.net/1942/17172
DOI: 10.1002/pssr.201409235
ISI #: 000340484100007
ISSN: 1862-6254
Category: A1
Type: Journal Contribution
Validation: ecoom, 2015
Appears in Collections: Research publications

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