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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/16754

Title: Transparent conducting oxide films of group V doped titania prepared by aqueous chemical solution deposition
Authors: ELEN, Ken
Capon, Boris
DE DOBBELAERE, Christopher
PEYS, Nick
Detavernier, Christophe
VAN BAEL, Marlies
Issue Date: 2014
Citation: THIN SOLID FILMS, 555, p. 33-38
Abstract: Transparent conducting oxide (TCO) films of titania doped with vanadium (V), niobium (Nb) and tantalum(Ta) are obtained by aqueous Chemical Solution Deposition (CSD). The effect of the dopant on the crystallization and microstructure of the resulting films is examined by means of X-ray diffraction and electron microscopy. During annealing of the thin films, in-situ characterization of the crystal structure and sheet resistance is carried out. Niobium doped anatase films, obtained after annealing in forming gas, show a resistivity of 0,28 Ohm cm, which is the lowest resistivity reported for a solution deposited anatase-based TCO so far. Here, we demonstrate that aqueous CSD may provide a strategy for scalable TCO production in the future.
URI: http://hdl.handle.net/1942/16754
DOI: 10.1016/j.tsf.2013.05.104
ISI #: 000331546400008
ISSN: 0040-6090
Category: A1
Type: Journal Contribution
Validation: ecoom, 2015
Appears in Collections: Research publications

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