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|Title: ||Aqueous chemical solution deposition of LuFeO3 thin high-k films|
|Authors: ||GIELIS, Sven|
VAN ELSCHOCHT, Sven
DE GENDT, Stefan
VAN BAEL, Marlies K.
|Issue Date: ||2012|
|Citation: ||WE Heraeus-Physics School on "Microelectronics for Society – More than Moore expands More Moore", Bad Honnef - Germany, 10-16 June 2012|
|Type: ||Conference Material|
|Appears in Collections: ||Research publications|
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