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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/1582

Title: Thick single crystal CVD diamond prepared from CH4-rich mixtures
Authors: BOGDAN, Anna
De Corte, K.
DEFERME, Wim
HAENEN, Ken
NESLADEK, Milos
Issue Date: 2006
Publisher: Wiley
Citation: PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 203(12). p. 3063-3069
Abstract: Recent interests in freestanding single-crystal CVD diamond (SC-CVD) discs for several applications in electronics led to an intense study of SC-CVD layer growth and properties. In this work we have investigated the growth mechanism of monocrystalline CVD diamond films with surfaces smooth in nanometer scale taking into account the defect incorporation in the SC-CVD layers. Specifically we discuss the surface structure characteristics for these conditions as studied with high-resolution AFM mapping. The as-grown CVD layers were removed from the substrate by laser cutting, followed by a polishing step, yielding freestanding plates. Subsequently, microscopic and colour studies as well as infrared absorption spectroscopy were performed. These investigations revealed the presence of several characteristic defects and impurities
URI: http://hdl.handle.net/1942/1582
DOI: 10.1002/pssa.200671128
ISI #: 000240967400012
ISSN: 0031-8965
Category: A1
Type: Journal Contribution
Validation: ecoom, 2007
Appears in Collections: Research publications

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