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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/1485

Title: 5 GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography
Authors: Kirsch, P.
Assouar, Mohamed B.
Elmazria, O.
MORTET, Vincent
Alnot, P.
Issue Date: 2006
Publisher: AIP
Citation: APPLIED PHYSICS LETTERS, 88(22). p. 223504-...
Abstract: Very high frequency surface acoustic wave (SAW) devices based on AlN/diamond layered structures were fabricated by direct writing using e-beam lithography on the nucleation side of chemical vapor deposition diamond. The interdigital transducers made in aluminum with resolutions down to 500 nm were patterned on AlN/diamond layered structure with an adapted technological process. Experimental results show that the Rayleigh wave and the higher modes are generated. The fundamental frequency around 5 GHz was obtained for this layered structure SAW device and agrees well with calculated results from dispersion curves of propagation velocity and electromechanical coupling coefficient.
URI: http://hdl.handle.net/1942/1485
DOI: 10.1063/1.2208372
ISI #: 000238001900084
ISSN: 0003-6951
Category: A1
Type: Journal Contribution
Validation: ecoom, 2007
Appears in Collections: Research publications

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