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|Title: ||5 GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography|
|Authors: ||Kirsch, P.|
Assouar, Mohamed B.
|Issue Date: ||2006|
|Citation: ||APPLIED PHYSICS LETTERS, 88(22). p. 223504-...|
|Abstract: ||Very high frequency surface acoustic wave (SAW) devices based on AlN/diamond layered structures were fabricated by direct writing using e-beam lithography on the nucleation side of chemical vapor deposition diamond. The interdigital transducers made in aluminum with resolutions down to 500 nm were patterned on AlN/diamond layered structure with an adapted technological process. Experimental results show that the Rayleigh wave and the higher modes are generated. The fundamental frequency around 5 GHz was obtained for this layered structure SAW device and agrees well with calculated results from dispersion curves of propagation velocity and electromechanical coupling coefficient.|
|ISI #: ||000238001900084|
|Type: ||Journal Contribution|
|Validation: ||ecoom, 2007|
|Appears in Collections: ||Research publications|
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