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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/14340

Title: Spin-seeding approach for diamond growth on large area silicon-wafer substrates
Authors: Tsigkourakos, Menelaos
Hantschel, Thomas
JANSSENS, Stoffel
HAENEN, Ken
Vandervorst, Wilfried
Issue Date: 2012
Publisher: WILEY-V C H VERLAG GMBH
Citation: PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 209 (9), p. 1659-1663
Abstract: The growth of polycrystalline diamond by chemical vapor deposition requires a substrate pre-treatment in order to achieve thin, high-quality, and pore-free diamond layers. Seeding the substrate by immersing it into a nanodiamond (ND) dispersion is most commonly used today, since it yields a high-density seed layer (>1011?cm-2) and leads to a thin closed polycrystalline diamond film. Nevertheless, in a nanoelectronics fabrication facility it would be advantageous to use spinning for seeding the substrate as it is already well established for resist coating and spray etching. Additionally, each wafer would use a fresh and limited amount of seeding dispersion which will not be contaminated due to a certain number of immersion-seeding runs. Therefore, we carried out a detailed study of the spin-seeding technique in terms of seed density and its impact on diamond layer quality. Our work shows that by the spin-seeding approach, homogeneous seed layers with a seeding density up to 5 x 1010?cm-2 can be obtained on both 100 and 200?mm silicon wafers using 5 and 20?mL of a colloidal dispersion, respectively. ND dispersed in water +10% (v/v) ethanol gave the best results in terms of seeding density and wetting of the substrate surface.
Notes: [Tsigkourakos, Menelaos; Hantschel, Thomas; Vandervorst, Wilfried] IMEC, B-3001 Louvain, Belgium. [Tsigkourakos, Menelaos; Vandervorst, Wilfried] Katholieke Univ Leuven, Dept Phys & Astron, B-3001 Louvain, Belgium. [Janssens, Stoffel D.; Haenen, Ken] IMEC, IMOMEC, B-3590 Diepenbeek, Belgium. [Janssens, Stoffel D.; Haenen, Ken] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. Menelaos.Tsigkourakos@imec.be
URI: http://hdl.handle.net/1942/14340
DOI: 10.1002/pssa.201200137
ISI #: 000308942100007
ISSN: 1862-6300
Category: A1
Type: Journal Contribution
Validation: ecoom, 2013
Appears in Collections: Research publications

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