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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/14314

Title: Grain size tuning of nanocrystalline chemical vapor deposited diamond by continuous electrical bias growth: Experimental and theoretical study
Authors: MORTET, Vincent
Zhang, Liang
Eckert, Maxie
D'HAEN, Jan
Soltani, Ali
Moreau, Myriam
Troadec, David
Neyts, Erik
De Jaeger, Jean-Claude
Verbeeck, Jo
Bogaerts, Annemie
Van Tendeloo, Gustaaf
HAENEN, Ken
WAGNER, Patrick
Issue Date: 2012
Publisher: WILEY-V C H VERLAG GMBH
Citation: PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 209 (9), p. 1675-1682
Abstract: In this work, a detailed structural and spectroscopic study of nanocrystalline diamond (NCD) thin films grown by a continuous bias assisted CVD growth technique is reported. This technique allows the tuning of grain size and phase purity in the deposited material. The crystalline properties of the films are characterized by SEM, TEM, EELS, and Raman spectroscopy. A clear improvement of the crystalline structure of the nanograined diamond film is observed for low negative bias voltages, while high bias voltages lead to thin films consisting of diamond grains of only 10 nm nanometer in size, showing remarkable similarities with so-called ultrananocrystalline diamond. These layers arecharacterized by an increasing amount of sp2-bonded carbon content of the matrix in which the diamond grains are embedded. Classical molecular dynamics simulations support the observed experimental data, giving insight in the underlying mechanism for the observed increase in deposition rate with bias voltage. Furthermore, a high atomic concentration of hydrogen has been determined in these films. Finally, Raman scattering analyses confirm that the Raman line observed at 1150 cm-1 cannot be attributed to trans-poly-acetylene, which continues to be reported in literature, reassigning it to a deformation mode of CHx bonds in NCD.
Notes: [Mortet, Vincent; D'Haen, Jan; Haenen, Ken; Wagner, Patrick] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Mortet, Vincent; D'Haen, Jan; Haenen, Ken; Wagner, Patrick] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium. [Mortet, Vincent] Univ Toulouse, CNRS, LAAS, F-31077 Toulouse, France. [Zhang, Liang; Verbeeck, Jo; Van Tendeloo, Gustaaf] Univ Antwerp, Electron Microscopy Mat Sci EMAT, B-2020 Antwerp, Belgium. [Eckert, Maxie; Neyts, Erik; Bogaerts, Annemie] Univ Antwerp, Dept Chem, Res Grp PLASMANT, B-2610 Antwerp, Belgium. [Soltani, Ali; Troadec, David; De Jaeger, Jean-Claude] CNRS, UMR 8520, Inst Elect Microelect & Nanotechnol, F-59652 Villeneuve Dascq, France. [Moreau, Myriam] Univ Sci & Technol Lille, Lab Spectrochim Infrarouge & Raman, F-59655 Villeneuve Dascq, France. ken.haenen@uhasselt.be
URI: http://hdl.handle.net/1942/14314
DOI: 10.1002/pssa.201200581
ISI #: 000308942100009
ISSN: 1862-6300
Category: A1
Type: Journal Contribution
Validation: ecoom, 2013
Appears in Collections: Research publications

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