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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/1405

Title: Diamond - Application to piezoelectric bimorph cantilever sensors
Authors: MORTET, Vincent
HAENEN, Ken
Potmesil, J.
Vanecek, M.
D'OLIESLAEGER, Marc
Issue Date: 2006
Publisher: Wiley
Citation: PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 203(12). p. 3185-3190
Abstract: Micro-cantilevers are excellent tools to measure tiny forces (from 1 nN up to 10 N) as shown by the development of atomic force microscopy (AFM) techniques. That is the reason why micro-cantilevers are also the most sensitive acoustic sensors. For instance, one can use the variation of the cantilever's resonant frequency to measure mass loading. In this work, we will show first why diamond is the most suitable material for a special type of cantilever sensors: piezoelectric bimorph cantilever sensors. In contrast to other cantilevers, it is possible to actuate piezoelectric bimorph cantilevers and to detect their resonance frequencies simultaneously. Then, we present one application of this type of cantilever: a diamond/AlN cantilever used as a high pressure sensor (up to 7 ar). The sensor operates by monitoring the frequency shift of the first resonant mode (f 1 36.5 kHz). We have measured a sensitivity of 0.155 Hz/mbar in pure nitrogen
URI: http://hdl.handle.net/1942/1405
DOI: 10.1002/pssa.200671109
ISI #: 000240967400031
ISSN: 0031-8965
Category: A1
Type: Journal Contribution
Validation: ecoom, 2007
Appears in Collections: Research publications

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