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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/13829

Title: Optical phonon lifetimes in sputtered AlN thin films
Authors: Pobedinskas, P.
Ruttens, B.
D'Haen, J.
Haenen, K.
Issue Date: 2012
Publisher: AMER INST PHYSICS
Citation: APPLIED PHYSICS LETTERS, 100 (19), p. Article 191906
Abstract: We study the vibrational properties of AlN thin films deposited on silicon (100) substrates by the reactive DC-pulsed magnetron sputtering. The frequencies and lifetimes of the E-1(TO) and A(1)(LO) optical phonons are calculated from Fourier transform infrared spectra using the factorized model of a damped oscillator. We analyze the structural properties by the x-ray diffraction technique to correlate the elongation of phonon lifetimes with increasing film thickness. The lifetimes of the phonon modes in AlN thin films are compared to the values in a single crystal. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4711773]
Notes: [Pobedinskas, P.; Ruttens, B.; D'Haen, J.; Haenen, K.] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Ruttens, B.; D'Haen, J.; Haenen, K.] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium.
URI: http://hdl.handle.net/1942/13829
DOI: 10.1063/1.4711773
ISI #: 000304108000026
ISSN: 0003-6951
Category: A1
Type: Journal Contribution
Validation: ecoom, 2013
Appears in Collections: Research publications

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