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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/13710

Title: Analytical TEM study of CVD diamond growth on TiO2 sol-gel layers
Authors: Lu, Ying-Gang
Verbeeck, Johan
Turner, Stuart
HARDY, An
JANSSENS, Stoffel
DE DOBBELAERE, Christopher
WAGNER, Patrick
VAN BAEL, Marlies
HAENEN, Ken
Van Tendeloo, Gustaaf
Issue Date: 2012
Publisher: ELSEVIER SCIENCE SA
Citation: DIAMOND AND RELATED MATERIALS, 23, p. 93-99
Abstract: The early growth stages of chemical vapor deposition(CVD) diamond on a sol-gel TiO2 with buried ultra dispersed diamond seeds(UDD)have been studied. In order to investigate the diamond growth mechanism and understand the role of the TiO2 layer in the growth process, high resolution transmission electron microscopy(HRTEM), energy-filtered TEM and electron energy loss spectroscopy(EELS)techniques were applied to cross sectionaldiamond film samples. We find evidence for the formation of TiC crystallites inside the TiO2 layer at different diamond growth stages. However, there is no evidence that diamond nucleation starts from these crystallites. Carbon diffusion into the TiO2 layer and the chemical bonding state of carbon (sp(2)/sp(3)) were both extensively investigated. We provide evidence that carbon diffuses through the TiO2 layer and that the diamond seeds partially convert to amorphous carbon during growth. This carbon diffusion and diamond to amorphous carbon conversion make the seed areas below the TiO2 layer grow and bend the TiO2 layer upwards to form the nucleation center of the diamond film. In some of the protuberances a core of diamond seed remains, covered by amorphous carbon. It is however unlikely that the remaining seeds are still active during the growth process.
Notes: [Lu, Ying-Gang; Verbeeck, Johan; Turner, Stuart; Van Tendeloo, Gustaaf] Univ Antwerp, EMAT, B-2020 Antwerp, Belgium. [Hardy, An; Janssens, Stoffel D.; De Dobbelaere, Christopher; Wagner, Patrick; Van Bael, Marlies K.; Haenen, Ken] Hasselt Univ, Inst Mat Res IMO, B-3950 Diepenbeek, Belgium. [Hardy, An; Janssens, Stoffel D.; Wagner, Patrick; Van Bael, Marlies K.; Haenen, Ken] IMOMEC, IMEC VZW, B-3590 Diepenbeek, Belgium. yinggang.lu@ua.ac.be
URI: http://hdl.handle.net/1942/13710
DOI: 10.1016/j.diamond.2012.01.022
ISI #: 000302887600017
ISSN: 0925-9635
Category: A1
Type: Journal Contribution
Validation: ecoom, 2013
Appears in Collections: Research publications

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