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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/13596

Title: Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers
Authors: Kulha, Pavel
Babchenko, Oleg
Kromka, Alexander
Husak, Miroslav
Haenen, Ken
Issue Date: 2012
Publisher: PERGAMON-ELSEVIER SCIENCE LTD
Citation: VACUUM, 86 (6), p. 689-692
Abstract: The paper reports on design, fabrication and characterization of piezoresistive sensors based on boron doped nanocrystalline diamond (NCD) layers. The shape and position of the piezoresistive element was optimized using finite element 3D modeling. Mechanical and piezoresistive simulations were performed. The piezoresistive sensing boron doped diamond thin films were realized on SiO2/Si3N4/Si substrates by microwave plasma enhanced chemical vapor deposition (CVD) and the piezoresistive structures were formed by reactive ion etching. The extensive study of sensor parameters e.g. deformation sensitivity, edge and contact resistances, temperature dependences gauge factor, temperature coefficient of resistance and bridge output voltage was performed. The highest gauge factor at higher temperatures (GF = 7.2 at 250 degrees C) was observed for moderate doping level (boron to carbon ratio of 3000 ppm). One of the aims was the extraction of piezoresistive coefficients of fabricated diamond layers for utilization in a finite element piezoresistive solver. (C) 2011 Elsevier Ltd. All rights reserved.
Notes: [Kulha, Pavel; Husak, Miroslav] Czech Tech Univ, Prague 16627, Czech Republic. [Babchenko, Oleg; Kromka, Alexander] Inst Phys ASCR, Prague, Czech Republic. [Babchenko, Oleg; Kromka, Alexander] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Haenen, Ken] Hasselt Univ, Div IMOMEC, IMEC Vzw, B-3590 Diepenbeek, Belgium.
URI: http://hdl.handle.net/1942/13596
DOI: 10.1016/j.vacuum.2011.07.022
ISI #: 000301018400025
ISSN: 0042-207X
Category: A1
Type: Journal Contribution
Validation: ecoom, 2013
Appears in Collections: Research publications

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