www.uhasselt.be
DSpace

Document Server@UHasselt >
Research >
Research publications >

Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/11568

Title: Characterization of nano-crystalline diamond films grown by continuous DC bias during plasma enhanced chemical vapor deposition
Authors: MORTET, Vincent
Zhang, Liang
Eckert, Maxie
Soltani, Ali
D'HAEN, Jan
DOUHERET, Olivier
Moreau, Myriam
Osswald, Sebastian
Neyts, Erik
Troadec, David
WAGNER, Patrick
Bogaerts, Annemie
Van Tendeloo, Gustaaf
HAENEN, Ken
Issue Date: 2010
Publisher: MATERIALS RESEARCH SOCIETY
Citation: Bergonzo, Philippe & Butler, James E. & Jackman, Richard B. & Loh, Kian Ping & Nesládek, Milos (Ed.) DIAMOND ELECTRONICS - FUNDAMENTALS TO APPLICATIONS III. p. 41-45.
Series/Report: MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, 1203
Abstract: Nanocrystalline diamond films have generated much interested due to their diamond-like properties and low surface roughness. Several techniques have been used to obtain a high renucleation rate, such as hydrogen poor or high methane concentration plasmas. In this work, the properties of nano-diamond films grown on silicon substrates using a continuous DC bias voltage during the complete duration of growth are studied. Subsequently, the layers were characterised by several morphological, structural and optical techniques. Besides a thorough investigation of the surface structure, using SEM and AFM, special attention was paid to the bulk structure of the films. The application of FTIR, XRD, multi wavelength Raman spectroscopy, TEM and EELS yielded a detailed insight in important properties such as the amount of crystallinity, the hydrogen content and grain size. Although these films are smooth, they are under a considerable compressive stress. FTIR spectroscopy points to a high hydrogen content in the films, while Raman and EELS indicate a high concentration of sp2 carbon. TEM and EELS show that these films consist of diamond nano-grains mixed with an amorphous sp2 bonded carbon, these results are consistent with the XRD and UV Raman spectroscopy data.
URI: http://hdl.handle.net/1942/11568
DOI: 10.1557/PROC-1203-J05-03
ISBN: 978-1-60511-176-6
ISSN: 0272-9172
Category: C1
Type: Proceedings Paper
Appears in Collections: Research publications

Files in This Item:

Description SizeFormat
Published version2.71 MBAdobe PDF

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.