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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/11452

Title: Design, fabrication and physical analysis of TiN/AlN deep UV photodiodes
Authors: Barkad, H.A.
Soltani, A.
Mattalah, M.
Gerbedoen, J-C
Rousseau, M.
De Jaeger, J-C
BenMoussa, A.
MORTET, Vincent
Benbakhti, B.
Moreau, M.
Dupuis, R.
Ougazzaden, A.
Issue Date: 2010
Abstract: Deep-ultraviolet solar-blind photodiodes based on high-quality AlN films grown on sapphire substrates with a metal-semiconductor-metal configuration were simulated and fabricated. The Schottky contact is based on TiN metallization. The material is characterized by the micro-Raman spectroscopy and x-ray diffraction technique. The detector presents an extremely low dark current of 100 fA at - 100 V dc bias for large device area as high as 3.1 mm(2). It also exhibits a rejection ratio between 180 and 300 nm of three orders of magnitude with a very sharp cut-off wavelength at 203 nm (similar to 6.1 eV). The simulation to optimize the photodiode topology is based on a 2D energy-balance model using the COMSOL (R) software. Simulation performed for different spacing for a given bias between electrodes show that a compromise must be found between the dark current and the responsivity for the optimization of the device performance. The measurement results are in good agreement with the model predictions.
Notes: [Barkad, H. A.; Mattalah, M.; Gerbedoen, J-C; Rousseau, M.; De Jaeger, J-C] Univ Lille 1, IEMN, UMR CNRS 8520, F-59652 Villeneuve Dascq, France. [BenMoussa, A.] ROB, STCE, B-1180 Brussels, Belgium. [Mortet, V.; Haenen, K.] Hasselt Univ, Inst Mat Res, B-3590 Diepenbeek, Belgium. [Soltani, A.] IMEC Vzw, Div IMOMEC, B-3590 Diepenbeek, Belgium. [Benbakhti, B.] Univ Glasgow, DEEE, Glasgow G12 8LT, Lanark, Scotland. [Moreau, M.] USTL, LASIR, F-59652 Villeneuve Dascq, France. [Dupuis, R.] Georgia Inst Technol, CCS SECE, Atlanta, GA 30332 USA. GTL, UMI GT CNRS 2958, F-57070 Metz, France. ali.soltani@iemn.univ-lille1.fr
URI: http://hdl.handle.net/1942/11452
DOI: 10.1088/0022-3727/43/46/465104
ISI #: 000283857000007
ISSN: 0022-3727
Category: A1
Type: Journal Contribution
Validation: ecoom, 2011
Appears in Collections: Research publications

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