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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/11411

Title: Strontium niobate high-k dielectrics: Film deposition and material properties
Authors: HARDY, An
Van Elshocht, S.
Adelmann, C.
Kittl, J. A.
De Gendt, S.
Heyns, M.
D'Olieslaeger, A.
VAN BAEL, Marlies
Issue Date: 2010
Citation: ACTA MATERIALIA, 58 (1). p. 216-225
Abstract: Strontium niobate ultrathin films were processed by water-based chemical solution deposition, an approach that offers environmental benefits. SrNb2O6 and SrNb2O7 show high-k values, which is important for applications such as alternative gate dielectrics. The study of ultrathin films (thickness <30 nm) is crucial, as this is the thickness range for the application envisaged, and as film properties depend strongly on the film thickness. SrNb2O6 had a lower crystallization temperature, less interfacial silicate, lower carbonate content, and higher roughness compared to SrNb2O7. The k values of amorphous films were limited for both compositions (k = 12-14). Crystallization and complete removal of organics or carbonates were accomplished by high-temperature annealing, but increased the roughness and leakage current. For SrNb2O7, interfacial silicates were formed as well. Intermediate calcination steps improved the surface smoothness and increased the k value of SrNb2O6 up to 30. (C) 2009 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
Notes: [Hardy, A.; Van Bael, M. K.; Van den Rul, H.; Mullens, J.] Hassell Univ, Inorgan & Phys Chem IMO, Inst Mat Res, B-3590 Diepenbeek, Belgium. [Hardy, A.; D'Haen, J.; D'Olieslaeger, A.; Van Bael, M. K.; Van den Rul, H.] IMOMEC, IMEC Vzw Div, Diepenbeek, Belgium. [Van Elshocht, S.; Adelmann, C.; Kittl, J. A.; De Gendt, S.; Heyns, M.] IMEC vzw, Heverlee, Belgium. [De Gendt, S.; Heyns, M.] KULeuven, Heverlee, Belgium. an.hardy@uhasselt.be
URI: http://hdl.handle.net/1942/11411
DOI: 10.1016/j.actamat.2009.09.006
ISI #: 000272405600023
ISSN: 1359-6454
Category: A1
Type: Journal Contribution
Validation: ecoom, 2010
Appears in Collections: Research publications

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