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|Title: ||Strontium niobate high-k dielectrics: Film deposition and material properties|
|Authors: ||HARDY, An|
Van Elshocht, S.
Kittl, J. A.
De Gendt, S.
VAN BAEL, Marlies
VAN DEN RUL, Heidi
|Issue Date: ||2010|
|Publisher: ||PERGAMON-ELSEVIER SCIENCE LTD|
|Citation: ||ACTA MATERIALIA, 58 (1). p. 216-225|
|Abstract: ||Strontium niobate ultrathin films were processed by water-based chemical solution deposition, an approach that offers environmental benefits. SrNb2O6 and SrNb2O7 show high-k values, which is important for applications such as alternative gate dielectrics. The study of ultrathin films (thickness <30 nm) is crucial, as this is the thickness range for the application envisaged, and as film properties depend strongly on the film thickness. SrNb2O6 had a lower crystallization temperature, less interfacial silicate, lower carbonate content, and higher roughness compared to SrNb2O7. The k values of amorphous films were limited for both compositions (k = 12-14). Crystallization and complete removal of organics or carbonates were accomplished by high-temperature annealing, but increased the roughness and leakage current. For SrNb2O7, interfacial silicates were formed as well. Intermediate calcination steps improved the surface smoothness and increased the k value of SrNb2O6 up to 30. (C) 2009 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.|
|Notes: ||[Hardy, A.; Van Bael, M. K.; Van den Rul, H.; Mullens, J.] Hassell Univ, Inorgan & Phys Chem IMO, Inst Mat Res, B-3590 Diepenbeek, Belgium. [Hardy, A.; D'Haen, J.; D'Olieslaeger, A.; Van Bael, M. K.; Van den Rul, H.] IMOMEC, IMEC Vzw Div, Diepenbeek, Belgium. [Van Elshocht, S.; Adelmann, C.; Kittl, J. A.; De Gendt, S.; Heyns, M.] IMEC vzw, Heverlee, Belgium. [De Gendt, S.; Heyns, M.] KULeuven, Heverlee, Belgium.
|ISI #: ||000272405600023|
|Type: ||Journal Contribution|
|Validation: ||ecoom, 2010|
|Appears in Collections: ||Research publications|
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