Document Server@UHasselt >
Research >
Research publications >

Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/11217

Title: Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system
Authors: Fendrych, Frantisek
Taylor, Andrew
Peksa, Ladislav
Kratochvilova, Irena
Vlcek, Jan
Rezacova, Vladimira
Petrak, Vaclav
Kluiber, Zdenek
Fekete, Ladislav
Liehr, Michael
Issue Date: 2010
Abstract: Industrial applications of plasma-enhanced chemical vapour deposition (CVD) diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan, the high-density coaxial delivery type of plasmas has been explored (Tsugawa et al 2006 New Diamond Front. Carbon Technol. 16 337-46). However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In this work we introduce the concept of novel linear antenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge with a high plasma density. This type of pulse discharges leads to the preparation of nanocrystalline diamond (NCD) thin films, compared with ultra-NCD thin films prepared in (Tsugawa et al 2006 New Diamond Front. Carbon Technol. 16 337-46). We present optical emission spectroscopy data for the CH4-CO2-H-2 gas chemistry and we discuss the basic properties of the NCD films grown.
Notes: [Fendrych, Frantisek; Taylor, Andrew; Peksa, Ladislav; Kratochvilova, Irena; Kluiber, Zdenek; Fekete, Ladislav] Acad Sci Czech Republic, Inst Phys, VVI, CZ-18221 Prague 8, Czech Republic. [Vlcek, Jan] Prague Inst Chem Technol, Dept Phys & Measurement, CZ-16628 Prague, Czech Republic. [Rezacova, Vladimira; Petrak, Vaclav; Kluiber, Zdenek] Czech Tech Univ, Fac Biomed Engn, CZ-27201 Kladno 2, Czech Republic. [Liehr, Michael] Leybold Opt Dresden GmbH, D-01109 Dresden, Germany. [Nesladek, Milos] Univ Hasselt, IMEC, Inst Mat Res, IMOMEC Div, B-3590 Diepenbeek, Belgium. fendrych@fzu.cz
URI: http://hdl.handle.net/1942/11217
DOI: 10.1088/0022-3727/43/37/374018
ISI #: 000281544100019
ISSN: 0022-3727
Category: A1
Type: Journal Contribution
Validation: ecoom, 2011
Appears in Collections: Research publications

Files in This Item:

There are no files associated with this item.

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.