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|Title: ||Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system|
|Authors: ||Fendrych, Frantisek|
|Issue Date: ||2010|
|Publisher: ||IOP PUBLISHING LTD|
|Citation: ||JOURNAL OF PHYSICS D-APPLIED PHYSICS, 43(37)|
|Abstract: ||Industrial applications of plasma-enhanced chemical vapour deposition (CVD) diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan, the high-density coaxial delivery type of plasmas has been explored (Tsugawa et al 2006 New Diamond Front. Carbon Technol. 16 337-46). However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In this work we introduce the concept of novel linear antenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge with a high plasma density. This type of pulse discharges leads to the preparation of nanocrystalline diamond (NCD) thin films, compared with ultra-NCD thin films prepared in (Tsugawa et al 2006 New Diamond Front. Carbon Technol. 16 337-46). We present optical emission spectroscopy data for the CH4-CO2-H-2 gas chemistry and we discuss the basic properties of the NCD films grown.|
|Notes: ||[Fendrych, Frantisek; Taylor, Andrew; Peksa, Ladislav; Kratochvilova, Irena; Kluiber, Zdenek; Fekete, Ladislav] Acad Sci Czech Republic, Inst Phys, VVI, CZ-18221 Prague 8, Czech Republic. [Vlcek, Jan] Prague Inst Chem Technol, Dept Phys & Measurement, CZ-16628 Prague, Czech Republic. [Rezacova, Vladimira; Petrak, Vaclav; Kluiber, Zdenek] Czech Tech Univ, Fac Biomed Engn, CZ-27201 Kladno 2, Czech Republic. [Liehr, Michael] Leybold Opt Dresden GmbH, D-01109 Dresden, Germany. [Nesladek, Milos] Univ Hasselt, IMEC, Inst Mat Res, IMOMEC Div, B-3590 Diepenbeek, Belgium.
|ISI #: ||000281544100019|
|Type: ||Journal Contribution|
|Validation: ||ecoom, 2011|
|Appears in Collections: ||Research publications|
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