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Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/10318

Title: Properties of Ultrathin High Permittivity (Nb1-xTax)(2)O-5 Films Prepared by Aqueous Chemical Solution Deposition
Authors: Hardy, An
Van Elshocht, S.
Dewulf, Daan
Clima, S.
Peys, Nick
Adelmann, C.
Opsomer, K.
Favia, P.
Bender, Hugo
Hoflijk, I.
Conard, T.
Franquet, A.
Van Den Rul, Heidi
Kittl, J. A.
De Gendt, S.
Van Bael, Marlies
Mullens, Jules
Issue Date: 2010
Abstract: Ultrathin (Nb1-xTax)(2)O-5 films, with thicknesses from similar to 3 to similar to 25 nm, were deposited by chemical solution deposition starting from aqueous precursor solutions. The film's dielectric properties were characterized by capacitance-voltage and current-voltage measurements. Permittivities ranged from 20 to 31 after annealing at 600 degrees C, with the highest value obtained for pure Nb2O5. With increasing Nb content, increasing leakage currents were observed. The crystallization temperature was determined by in situ X-ray diffraction measurement for films with similar to 15 nm thickness: Nb2O5 was crystalline as deposited (600 degrees C), while the crystallization temperature of solid solutions increased with increasing Ta content, up to 875 degrees C for pure Ta2O5. NbTaO5 showed a marked increase in permittivity from 27 to 38 after crystallization anneal at 600 and 800 degrees C, respectively. For Nb2O5, no significant difference in permittivity was observed between amorphous and crystalline layers. (C) 2009 The Electrochemical Society. [DOI: 10.1149/1.3247348] All rights reserved.
Notes: [Hardy, A.; Dewulf, D.; Van den Rul, H.; Van Bael, M. K.; Mullens, J.] Hasselt Univ, Inorgan & Phys Chem Inst Mat Res, B-3590 Diepenbeek, Belgium. [Hardy, A.; Dewulf, D.; Van den Rul, H.; Van Bael, M. K.] Interuniv Microelect Ctr Vzw, Div IMOMEC, B-3590 Diepenbeek, Belgium. [Hardy, A.] Expertisectr Ind, Hogesch Limburg, B-3590 Diepenbeek, Belgium. [Van Elshocht, S.; Clima, S.; Peys, N.; Adelmann, C.; Opsomer, K.; Favia, P.; Bender, H.; Hoflijk, I.; Conard, T.; Franquet, A.; Kittl, J. A.; De Gendt, S.] Interuniv Microelect Ctr Vzw, B-3001 Heverlee, Belgium. [De Gendt, S.] Katholieke Univ Leuven, B-3001 Heverlee, Belgium.
URI: http://hdl.handle.net/1942/10318
DOI: 10.1149/1.3247348
ISI #: 000272387200072
ISSN: 0013-4651
Category: A1
Type: Journal Contribution
Validation: ecoom, 2010
Appears in Collections: Research publications

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